UltraLO-1800超低本底α计数器用于低阿尔法材料（low Alpha）和极低阿尔法材料（Ultra low Alpha）的检测，可检测材料的α辐射率，如半导体、微电子、集成电路等领域的晶圆片、焊接材料、封装材料、PCB材料等。基于其独特的内部结构设计和强大的算法，可以有效的识别和区分α测量中的有效信号和设备本底信号，并在处理数据时将本底信号直接去除，相当于达到等效本底0.0001 alpha/cm2/hr甚至更低，进而极大的缩短测量时间（可在10小时内完成0.001-0.0005 alpha/cm2/hr辐射率材料的检测；在100小时内完成小于0.0005 alpha/cm2/hr辐射率材料的检测）。 UltraLO-1800也可用于物理研究中的“罕见事件”测量和环保相关的研究。 |
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Counting system includes:
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Performance category | Specification |
Required counting time for measurement of ULA (0.001) sample1 | (50%) 6 hrs, (25%) 24hrs, (12.5%) 90 hrs -- (measurement accuracy) time |
Required counting time for measurement of LA (0.01) sample1 | (50%) 30 min, (25%) 2.5 hrs, (12.5%) 9 hrs -- (measurement accuracy) time |
Typical counter efficiency | > 90% of 2π |
Energy resolution (230Th source) | < 9% FWHM (at 4.6 MeV) |
Energy sensitivity range | 1-10 MeV |
Sample sizes (typical min - max) | 300mm wafer (707cm2) - 1800cm2 |
1 – Sample assumed to be 300mm wafer (count times drop by factor of 2.5 when using max sample area)
| Highlighted Features Robust Data Management: Easily access and review both current and historical measurement data. Data Export: Generate and save datasets in convenient ASCII format. Report Generation: Measurement results saved to PDF reports. System Health Information: Monitor system noise levels, gas flow rate, operating bias and more. |
Requirements | Specification |
Minimum sample size (typical) | 300mm wafer (707cm2) |
Maximum sample size | 1800cm2 |
Maximum sample weight | 20 lbs (9 kg) |
Maximum sample thickness | 0.25 in (6.3 mm) |
Counting Gas | Argon |
Gas pressure | 21psi (150kPa) ±5% |
Line Voltage | 100-240 (VAC) 50/60 Hz |
Power Consumption (Instrument) | 50 W (100 W maximum) |
Power Consumption (Laptop) | 30 W |
System dimensions (L x W x H) | 65 in x 35 in x 27 in (165 cm x 89 cm x 69 cm) |
Weight | 360 lb (163 kg) |